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Geßner, T
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1

Integration von Mikro- und Nanosystemen in Hybride Struktur..:

, In: Smarte Strukturen und Systeme,
Schüller, M. ; Lipowski, M. ; Grossmann, T.... - p. 161-171 , 2016
Link: https://doi.org/10.1515/..
 
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2

A new technology platform for fully integrated polymer base..:

, In: 4M 2006 - Second International Conference on Multi-Material Micro Manufacture,
Nestler, J. ; Hiller, K. ; Gessner, T.... - p. 35-38 , 2006
Link: https://doi.org/10.1016/..
 
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3

Chemical vapor deposition of C-F low-k materials:

, In: Interlayer Dielectrics for Semiconductor Technologies,
Uhlig, M. ; Gessner, T. - p. 201-225 , 2003
Link: https://doi.org/10.1016/..
 
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4

Spin-on Si-based low-k materials:

, In: Interlayer Dielectrics for Semiconductor Technologies,
Schulz, S.E. ; Gessner, T. - p. 227-259 , 2003
Link: https://doi.org/10.1016/..
 
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5

TiN diffusion barriers for copper metalization:

, In: European Workshop Materials for Advanced Metallization,,
Baumann, J. ; Werner, T. ; Rennau, M... - p. 127 , 1997
Link: https://doi.org/10.1109/..
 
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6

Mechanism studies of Cu RIE for VLSI interconnections:

, In: European Workshop Materials for Advanced Metallization,,
Markert, M. ; Bertz, A. ; Gessner, T. - p. 155,156,157 , 1997
Link: https://doi.org/10.1109/..
 
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7

TIN/W double layers as a barrier system for use in Cu metal..:

, In: European Workshop Materials for Advanced Metallization,,
Baumann, J. ; Markert, M. ; Werner, T.... - p. 128,129 , 1997
Link: https://doi.org/10.1109/..
 
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8

Stress in copper films for interconnects:

, In: European Workshop Materials for Advanced Metallization,,
Riedel, S. ; Rober, J. ; Schulz, S.E.. - p. 148,149 , 1997
Link: https://doi.org/10.1109/..
 
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9

Influence of carrier gas on Cu nucleation, film properties ..:

, In: European Workshop Materials for Advanced Metallization,,
Rober, J. ; Riedel, S. ; Schulz, S.E.. - p. 25,26 , 1997
Link: https://doi.org/10.1109/..
 
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10

MoSi2 FORMED BY ION IMPLANTATION THROUGH METAL CITIO TECHNI..:

, In: EPM '89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR,
Vetter, E. ; Grünewald, W. ; Tolonics, J.. - p. 264-267 , 1989
Link: https://doi.org/10.1515/..
 
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11

Redistribution of Implanted Arsenic in a MoSi^/Polysilicon ..:

, In: December 16,
Vetter, E. ; Gessner, T. ; Wieser, E.. - p. 677-681 , 1986
Link: https://doi.org/10.1515/..
 
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12

Erratum zu: Calculation of Neutron-Induced Defect Clusters ..:

, In: February 16,
Gessner, T. ; Pasemann, M. ; Schmidt, B. - p. 751-756 , 1984
Link: https://doi.org/10.1515/..
 
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13

Calculation of Neutron-Induced Defect Clusters in Silicon a..:

, In: May 16,
Gessner, T. ; Pasemann, M. ; Schmidt, B. - p. 133-139 , 1983
Link: https://doi.org/10.1515/..
 
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14

Gamma- und Röntgendetektoren aus hochohmigem neutronendotie..:

, In: Juli 1980,
Geßner, T. - p. 218-221 , 1980
Link: https://doi.org/10.1515/..
 
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15

Methods and Technologies for Mastering Uncertainty:

, In: Springer Tracts in Mechanical Engineering; Mastering Uncertainty in Mechanical Engineering,
Groche, Peter ; Abele, Eberhard ; Al-Baradoni, Nassr... - p. 209-364 , 2021
Link: https://doi.org/10.1007/..
 
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