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Hermanussen, M.
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1
Conformal slip-free wafer chucking using an actuated wafer ..:
, In:
2019 7th International Conference on Control, Mechatronics and Automation (ICCMA)
,
Hermanussen, S.J.
;
Habets, M.B.I.
;
Heertjes, M.F.
. - p. 278-282 , 2019
Link:
https://doi.org/10.1109/..
1-1
