Ikarashi, Makoto
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High mobility MISFET with low trapped charge in HfSiO films:

, In: 2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407),
 
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A highly manufacturable low power and high speed HfSiO CMOS..:

, In: IEEE International Electron Devices Meeting 2003,
Iwamoto, Toshiyuki ; Ogura, Takashi ; Terai, Masayuki... - p. 27.5.1-27.5.4 , 2003
 
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