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Lecture Notes in Electrical Engineering; The Proceedings of the 2021 Asia-Pacific International Symposium on Aerospace Technology (APISAT 2021), Volume 2 ,
1
An All-Silicon Comb-Tooth Capacitive MEMS Accelerometer:
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Lecture Notes in Electrical Engineering; The Proceedings of the 2021 Asia-Pacific International Symposium on Aerospace Technology (APISAT 2021), Volume 2 ,
2