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Park, Hye Ryeon
1
results:
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1
A Study on the Thermal Budget of Ferroelectric TiN/Hf0.5Zr0..:
, In:
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
Park, Hye Ryeon
;
Yoo, Jeong Gyu
;
Kang, Jong Mook
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/..
1-1
