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SHIRO, Taisuke
1
results:
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1
Needle-Type Oxygen Microsensor Made by Hybrid 3D Microfabri..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Nomaru, Juntaro
;
Masuda, Taisuke
;
Amaya, Satoshi
.. - p. 194-197 , 2024
Link:
https://doi.org/10.1109/..
1-1
