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Sakawa, Youichi
1
results:
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1
RF SHEET-PLASMA SOURCE USING PERMANENT MAGNETS:
, In:
Novel Materials Processing by Advanced Electromagnetic Energy Sources
,
Sakawa, Youichi
;
Yano, Kentaro
;
Shoji, Tatsuo
- p. 35-38 , 2005
Link:
https://doi.org/10.1016/..
1-1
