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Tian, Xiubo
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Plasma implantation of cylindrical bore - a reality?:

, In: IEEE Conference Record - Abstracts. 2002 IEEE International Conference on Plasma Science (Cat. No.02CH37340),
Xiubo Tian ; Chu, P.K. - p. 258 , 2002
Link: https://doi.org/10.1109/..
 
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