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Tietze, Max
1
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1
Gas Sensors Based on 1 & 2-Dof Piezoelectric Baw MEMS Reson..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Wang, Linlin
;
Wang, Chen
;
Tietze, Max
... - p. 871-874 , 2024
Link:
https://doi.org/10.1109/..
1-1
