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Tu, Ziqiang
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1

An Opto-mechanical MEMS Accelerometer with Noise Floor of 4..:

, In: 2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS),
Jiao, Shimin ; Ouyang, Hao ; Qu, Ziqiang... - p. 140-143 , 2023
Link: https://doi.org/10.1109/..
 
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2

A High-sensitivity Optical MEMS Accelerometer based on SOI ..:

, In: 2020 IEEE Sensors,
Qu, Ziqiang ; Liu, Huafeng ; Ouyang, Hao.. - p. 1-4 , 2020
Link: https://doi.org/10.1109/..
 
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