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Ensinger, W.
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1
Plasma Immersions Ionenimplantation
Teilvorhaben: Anwendungsorientierte Grundlagen der PII ; Ab...
Rauschenbach, B.
;
Ensinger, W.
- [Electronic ed.] . , 1997
Link:
http://edok01.tib.uni-ha..
1-1
