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Pacco, Antoine
27
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1
Solving the Annealing of Mo Interconnects for Next‐Gen Inte..:
Erofeev, Ivan
;
Hartanto, Antony Winata
;
Saidov, Khakimjon
...
Advanced Electronic Materials. , 2024
Link:
https://doi.org/10.1002/..
?
2
Plasma Oxidation of Patterned Mo Nanowires for Precise and ..:
Erofeev, Ivan
;
Khan, Muhaimin Mareum
;
Aabdin, Zainul
...
Solid State Phenomena. 346 (2023) - p. 346-350 , 2023
Link:
https://doi.org/10.4028/..
?
3
Controlled and Uniform Wet Etching of Molybdenum Nanowires:
Deng, Ke Rong
;
Erofeev, Ivan
;
Chowdhuri, Angshuman Ray
...
Solid State Phenomena. 346 (2023) - p. 351-355 , 2023
Link:
https://doi.org/10.4028/..
?
4
Study on Alternative Dipole Material Wet Clean by pH Contro..:
Tanaka, Yoichi
;
Gan, Nobuko
;
Ogawa, Yuuichi
...
Solid State Phenomena. 346 (2023) - p. 69-73 , 2023
Link:
https://doi.org/10.4028/..
?
5
Controlled Stepwise Wet Etching of Polycrystalline Mo Nanow..:
Saidov, Khakimjon
;
Erofeev, Ivan
;
Aabdin, Zainul
...
Advanced Functional Materials. 34 (2023) 12 - p. , 2023
Link:
https://doi.org/10.1002/..
?
6
Controlling the Wet-Etch Directionality in Nanostructured S..:
Aabdin, Zainul
;
Ghosh, Tanmay
;
Pacco, Antoine
...
ACS Applied Electronic Materials. 4 (2022) 11 - p. 5191-5198 , 2022
Link:
https://doi.org/10.1021/..
?
7
Fabrication and room temperature characterization of trilay..:
Wan, Danny
;
Couet, Sebastian
;
Piao, Xiaoyu
...
Japanese Journal of Applied Physics. 60 (2021) SB - p. SBBI04 , 2021
Link:
https://doi.org/10.35848..
?
8
Scaled-Down c-Si and c-SiGe Wagon-Wheels for the Visualizat..:
Pacco, Antoine
;
Tao, Zheng
;
Rip, Jens
...
Nanoscale Research Letters. 14 (2019) 1 - p. , 2019
Link:
https://doi.org/10.1186/..
?
9
Controlled cobalt recess for advanced interconnect metalliz..:
Pacco, Antoine
;
Akanishi, Yuya
;
Le, Quoc Toan
...
Microelectronic Engineering. 217 (2019) - p. 111131 , 2019
Link:
https://doi.org/10.1016/..
?
10
Selective Wet Etching of Silicon Germanium in Composite Ver..:
Baraissov, Zhaslan
;
Pacco, Antoine
;
Koneti, Siddardha
...
ACS Applied Materials & Interfaces. 11 (2019) 40 - p. 36839-36846 , 2019
Link:
https://doi.org/10.1021/..
?
11
Wet Metal Recess Process for Enabling Scaling Boosters:
Akanishi, Yuya
;
Kesters, Els
;
Le, Quoc Toan
..
ECS Transactions. 92 (2019) 2 - p. 255-263 , 2019
Link:
https://doi.org/10.1149/..
?
12
Visualizing anisotropy in the surface oxidation of germaniu..:
Abrenica, Graniel Harne A.
;
Lebedev, Mikhail V.
;
Pacco, Antoine
...
Chemical Communications. 55 (2019) 73 - p. 10864-10867 , 2019
Link:
https://doi.org/10.1039/..
?
13
Non-destructive characterization of extended crystalline de..:
Schulze, Andreas
;
Strakos, Libor
;
Vystavel, Tomas
...
Nanoscale. 10 (2018) 15 - p. 7058-7066 , 2018
Link:
https://doi.org/10.1039/..
?
14
A Study of Nanoparticle Removal on Patterned Surfaces:
Pacco, Antoine
;
Holsteyns, Frank
;
De Gendt, Stefan
ECS Transactions. 58 (2013) 6 - p. 17-23 , 2013
Link:
https://doi.org/10.1149/..
?
15
The Influence of Dissolved Carbon Dioxide on Cavitation Int..:
Brems, Steven
;
Hauptmann, Marc
;
Camerotto, Elisabeth
...
Japanese Journal of Applied Physics. 52 (2013) 6R - p. 066602 , 2013
Link:
https://doi.org/10.7567/..
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