Beladiya, Vivek ;
Becker, Martin ;
Faraz, Tahsin...
Beladiya , V , Becker , M , Faraz , T , Kessels , W M M , Schenk , P , Otto , F , Fritz , T , Gruenewald , M , Helbing , C , Jandt , K D , Tünnermann , A , Sierka , M & Szeghalmi , A 2020 , ' Effect of an electric field during the deposition of silicon dioxide thin films by plasma enhanced atomic layer deposition : an experimental and computational study ' , Nanoscale , vol. 12 , no. 3 , pp. 2089-2102 . https://doi.org/10.1039/c9nr07202k.
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2020