Ylivaara, Oili M.E ;
Langner, Andreas ;
Liu, Xuwen...
Ylivaara , O M E , Langner , A , Liu , X , Schneider , D , Julin , J , Arstila , K , Sintonen , S , Ali , S , Lipsanen , H , Sajavaara , T , Hannula , S & Puurunen , R L 2021 , ' Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition ' , Thin Solid Films , vol. 732 , 138758 . https://doi.org/10.1016/j.tsf.2021.138758.
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2021
