Ageev, O. A.
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3

Silicon-on-Silicon Oxide Metalens: Design and Fabrication A..:

, In: Springer Proceedings in Materials; Physics and Mechanics of New Materials and Their Applications,
Gusev, E. Yu. ; Avdeev, S. P. ; Malokhatko, S. V.... - p. 56-67 , 2024
 
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4

Sublimation Mechanism for Polishing Silicon Carbide Wafers ..:

Atamanchuk, A. ; Avdeev, S. ; Gusev, E..
Russian Microelectronics.  52 (2023)  S1 - p. S176-S178 , 2023
 
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6

Metasurface Technology and Device for Ultra Precision Optic..:

, In: 2023 21st International Conference on Optical Communications and Networks (ICOCN),
Han, L. L. ; Chen, D. ; Ren, X. R.... - p. 1-3 , 2023
 
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7

Calculation of Vibrations of Silicon Membranes for an Acous..:

Efimov, T. A. ; Rassolov, E. A. ; Kulchin, Yu. N....
Bulletin of the Lebedev Physics Institute.  49 (2022)  3 - p. 78-82 , 2022
 
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11

Study of Silicon Etching Modes in Combined Plasma Discharge..:

Klimin, V. S. ; Kessler, I. O. ; Morozova, Y. V....
Bulletin of the Russian Academy of Sciences: Physics.  86 (2022)  S1 - p. S96-S99 , 2022
 
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15

Investigation of the effect of annealing on Si(100) substra..:

Eremenko, M M ; Shandyba, N A ; Chernenko, N E...
Journal of Physics: Conference Series.  2086 (2021)  1 - p. 012027 , 2021
 
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