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2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) ,
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Advanced BEOL process integration for logic technology node:
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2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) ,
2
The Second Generation of Integrated Stack Capacitor (ISC) f..:
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2022 IEEE International Interconnect Technology Conference (IITC) ,
3
EUV Minimum Pitch Single Patterning for 5nm Node Manufactur..:
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2021 IEEE International Interconnect Technology Conference (IITC) ,
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