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Airaksinen, Veli-Matti
163  results:
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1

Measuring oxygen and bulk microdefects in silicon:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Savin, Hele ; Kissinger, Gudrun ; Airaksinen, Veli-Matti - p. 775-779 , 2020
Link: https://doi.org/10.1016/..
 
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2

List of contributors:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Aalto, Timo ; Airaksinen, Veli-Matti ; Albert, Stephan Gerhard... - p. xv-xvii , 2020
Link: https://doi.org/10.1016/..
 
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3

Silicon wafer and thin-film measurements:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Airaksinen, Veli-Matti - p. 765-774 , 2020
Link: https://doi.org/10.1016/..
 
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4

List of Contributors:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Aalto, Timo ; Airaksinen, Veli-Matti ; Amiotti, Marco... - p. xiii-xv , 2015
Link: https://doi.org/10.1016/..
 
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5

Silicon Wafer and Thin Film Measurements:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Airaksinen, Veli-Matti - p. 381-390 , 2015
Link: https://doi.org/10.1016/..
 
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6

Oxygen and Bulk Microdefects in Silicon:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Savin, Hele ; Airaksinen, Veli-Matti - p. 421-424 , 2015
Link: https://doi.org/10.1016/..
 
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7

Introduction to Measuring MEMS:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Airaksinen, Veli-Matti - p. 377-380 , 2015
Link: https://doi.org/10.1016/..
 
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8

Properties of AlN grown by plasma enhanced atomic layer dep..:

Bosund, Markus ; Sajavaara, Timo ; Laitinen, Mikko...
Applied Surface Science.  257 (2011)  17 - p. 7827-7830 , 2011
Link: https://doi.org/10.1016/..
 
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9

Nd-doped Bismuth Titanate based ferroelectric field effect ..:

, In: 2011 IEEE International Conference of Electron Devices and Solid-State Circuits,
Feng, Tingling ; Xie, Dan ; Zang, Yongyuan... - p. 1-2 , 2011
Link: https://doi.org/10.1109/..
 
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10

Silicon Wafer and Thin Film Measurements:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Airaksinen, Veli-Matti - p. 289-298 , 2010
Link: https://doi.org/10.1016/..
 
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11

Atomic layer deposition of tin dioxide sensing film in micr..:

Niskanen, Antti J. ; Varpula, Aapo ; Utriainen, Mikko...
Sensors and Actuators B: Chemical.  148 (2010)  1 - p. 227-232 , 2010
Link: https://doi.org/10.1016/..
 
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12

Oxygen and Bulk Microdefects in Silicon:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Savin, Hele ; Airaksinen, Veli-Matti - p. 327-330 , 2010
Link: https://doi.org/10.1016/..
 
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13

Introduction to Measuring MEMS:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Airaksinen, Veli-Matti - p. 283-287 , 2010
Link: https://doi.org/10.1016/..
 
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14

List of Contributors:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Aalto, Timo ; Airaksinen, Veli-Matti ; Amiotti, Marco... - p. xi-xiii , 2010
Link: https://doi.org/10.1016/..
 
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15

[THREATGÅRDEN] Novel Hand-Held Chemical Detector with Micro..:

Utriainen, Mikko ; Varpula, Aapo ; J. Niskanen, Antti...
http://urn.kb.se/resolve?urn=urn:nbn:se:norden:org:diva-2768.  , 2008
Link: http://urn.kb.se/resolve..
 
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