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Ashizawa, Toranosuke
11
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1
Effect of pad groove width on slurry mean residence time an..:
Mu, Yan
;
Zhuang, Yun
;
Sampurno, Yasa
...
Microelectronic Engineering. 157 (2016) - p. 60-63 , 2016
Link:
https://doi.org/10.1016/..
?
2
Effect of pad surface micro-texture on dishing and erosion ..:
Liao, Xiaoyan
;
Zhuang, Yun
;
Borucki, Leonard J.
...
Japanese Journal of Applied Physics. 53 (2014) 8 - p. 086501 , 2014
Link:
https://doi.org/10.7567/..
?
3
Effect of Pad Surface Micro-Texture on Removal Rate during ..:
Liao, Xiaoyan
;
Zhuang, Yun
;
Borucki, Leonard J.
...
Japanese Journal of Applied Physics. 52 (2012) 1R - p. 018001 , 2012
Link:
https://doi.org/10.7567/..
?
4
Chemical Mechanical Polishing with Nanocolloidal Ceria Slur..:
Ryuzaki, Daisuke
;
Hoshi, Yosuke
;
Machii, Yoichi
...
Japanese Journal of Applied Physics. 51 (2012) 3R - p. 036502 , 2012
Link:
https://doi.org/10.7567/..
?
5
Chemical Mechanical Polishing with Nanocolloidal Ceria Slur..:
Ryuzaki, Daisuke
;
Hoshi, Yosuke
;
Machii, Yoichi
...
Japanese Journal of Applied Physics. 51 (2012) 3R - p. 036502 , 2012
Link:
https://doi.org/10.1143/..
?
6
Pattern evolution in shallow trench isolation chemical mech..:
Sampurno, Yasa
;
Sudargho, Fransisca
;
Zhuang, Yun
...
Microelectronic Engineering. 88 (2011) 9 - p. 2857-2861 , 2011
Link:
https://doi.org/10.1016/..
?
7
Effect of Pad Micro-Texture on Frictional Force, Removal Ra..:
Zhuang, Yun
;
Liao, Xiaoyan
;
Borucki, Leonard J.
...
ECS Transactions. 27 (2010) 1 - p. 599-604 , 2010
Link:
https://doi.org/10.1149/..
?
8
Effect of Cerium Oxide Particle Sizes in Oxide Chemical Mec..:
Sampurno, Yasa
;
Sudargho, Fransisca
;
Zhuang, Yun
...
Electrochemical and Solid-State Letters. 12 (2009) 6 - p. H191 , 2009
Link:
https://doi.org/10.1149/..
?
9
A New Cerium-Based Ternary Oxide Slurry, CeTi2O6, for Chemi..:
Yoshida, Masato
;
Koyama, Naoyuki
;
Ashizawa, Toranosuke
..
Japanese Journal of Applied Physics. 46 (2007) 3R - p. 977 , 2007
Link:
https://doi.org/10.1143/..
?
10
Effect of Pad Surface Roughness on SiO2 Removal Rate in Che..:
Yoshida, Masato
;
Ono, Hiroshi
;
Nishiyama, Masaya
..
Japanese Journal of Applied Physics. 45 (2006) 2R - p. 733 , 2006
Link:
https://doi.org/10.1143/..
?
11
Variation of Composition in a Bi(Pb)-Sr-Ca-Cu-O Grain and t..:
Ashizawa, Toranosuke
;
Shimoda, Shuichiro
;
Yamana, Shozo
...
Japanese Journal of Applied Physics. 28 (1989) 7A - p. L1140 , 1989
Link:
https://doi.org/10.1143/..
1-11