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2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) ,
1
Enhanced Piezoelectric $\mathrm{AL}_{1-\mathrm{X}}\mathrm{S..:
, In:
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2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (EFTF/IFC) ,
2