Bauhuber, Michael
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Isotropic wet chemical etching of deep channels with optica..:

Bauhuber, Michael ; Mikrievskij, Andreas ; Lechner, Alfred
Materials Science in Semiconductor Processing.  16 (2013)  6 - p. 1428-1433 , 2013
 
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Forschungsbericht 2013:

Beimler, Josef ; Leißl, Caroline ; Ebner, Lena...
https://opus4.kobv.de/opus4-oth-regensburg/frontdoor/index/index/docId/799.  , 2014
 
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