Benoit Curvers
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3D Simulation for Melt Laser Anneal Integration in FinFET's..:

Tabata, Toshiyuki ; Curvers, Benoit ; Huet, Karim...
IEEE Journal of the Electron Devices Society.  8 (2020)  - p. 1323-1327 , 2020
 
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Advanced simulations on laser annealing: explosive crystall..:

, In: 2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD),
 
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