Beyer, Gerald
201  results:
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1

Multi-tier die stacking through collective die-to-wafer hyb..:

, In: 2024 IEEE 74th Electronic Components and Technology Conference (ECTC),
Kennes, Koen ; Lin, Ye ; Suhard, Samuel... - p. 637-642 , 2024
 
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2

Scaling Cu/SiCN Wafer-to-Wafer Hybrid Bonding down to 400 n..:

, In: 2024 IEEE 74th Electronic Components and Technology Conference (ECTC),
Zhang, Boyao ; Chew, Soon-Aik ; Stucchi, Michele... - p. 312-318 , 2024
 
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3

3D interconnects for quantum computing:

, In: 2024 IEEE 74th Electronic Components and Technology Conference (ECTC),
 
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4

Investigation of Distortion in Wafer-to-wafer Bonding with ..:

, In: 2024 IEEE 74th Electronic Components and Technology Conference (ECTC),
Kang, Shuo ; Iacovo, Serena ; D'have, Koen... - p. 386-393 , 2024
 
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5

Direct Die-to-Wafer Hybrid Bonding Using Plasma Diced Dies ..:

, In: 2024 IEEE 74th Electronic Components and Technology Conference (ECTC),
Lin, Ye ; Bex, Pieter ; Kennes, Koen... - p. 40-44 , 2024
 
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7

The Challenges and Solutions of Cu/SiCN Wafer-to-Wafer Hybr..:

, In: 2023 International Electron Devices Meeting (IEDM),
 
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8

Detection of bonding voids in multi-tier stacks with scanni..:

, In: 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC),
Chen, Cong ; Slabbekoorn, John ; Bogdanowicz, Janusz... - p. 320-325 , 2023
 
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9

New Cu "Bulge-Out" Mechanism Supporting SubMicron Scaling o..:

, In: 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC),
 
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10

Process Challenges During CVD Oxide Deposition on the Backs..:

, In: 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC),
 
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11

A Study of SiCN Wafer-to-Wafer Bonding and Impact of Wafer ..:

, In: 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC),
Iacovo, Serena ; D'have, Koen ; Okudur, Oguzhan Orkut... - p. 1410-1417 , 2023
 
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12

Nano-Through Silicon Vias (nTSV) for Backside Power Deliver..:

, In: 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits),
 
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13

Integration of plasma dicing in the collective die to wafer..:

, In: 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC),
Suhard, Samuel ; Kennes, Koen ; Bex, Pieter... - p. 144-149 , 2023
 
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14

700nm pitch Cu/SiCN wafer-to-wafer hybrid bonding:

, In: 2022 IEEE 24th Electronics Packaging Technology Conference (EPTC),
Chew, Soon-Aik ; Iacovo, Serena ; Fordor, Ferenc... - p. 334-337 , 2022
 
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15

Buried Power Rails and Nano-Scale TSV: Technology Boosters ..:

, In: 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC),
 
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