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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) ,
8
Equidimensional Suspended Piezoelectric Micromachined Ultra..:
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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) ,
11
A Piezoelectric MEMS Resonant Temperature Sensor with 10-μk..:
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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) ,
14