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2024 Conference of Science and Technology for Integrated Circuits (CSTIC) ,
3
Characterization of ALD Low-K Films:
, In:
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2023 China Semiconductor Technology International Conference (CSTIC) ,
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The Study of Silicon Nitride Films Deposited In Batch ALD S..:
, In:
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2021 8th International Forum on Electrical Engineering and Automation (IFEEA) ,
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