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2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) ,
1
Implementation of a Monolithic SoC Environmental Sensing Hu..:
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2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) ,
2
Monolithic Integration of Humidity/Flow/Temperature Sensors..:
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2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) ,
3
Monolithically and Vertically Integrated Environmental Sens..:
, In:
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2023 International Conference on Cyberworlds (CW) ,
6