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Consiglio, Steve
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1
(Invited) Passivation Schemes for Ge High-K Metal Gate MOSF..:
Tapily, Kandabara
;
Ngai, Tat
;
Clark, Robert
...
ECS Transactions. 61 (2014) 2 - p. 89-96 , 2014
Link:
https://doi.org/10.1149/..
?
2
Higher-K Formation in Atomic Layer DepositedHf1-XAlxOy:
Tapily, Kandabara
;
Consiglio, Steve
;
Clark, Robert
...
ECS Transactions. 64 (2014) 9 - p. 123-131 , 2014
Link:
https://doi.org/10.1149/..
?
3
Effect of Al Doping on the Reliability of ALD HfO2:
Bhuyian, Mdnasiruddin
;
Misra, Durga
;
Tapily, Kandabara
...
ECS Transactions. 64 (2014) 8 - p. 29-43 , 2014
Link:
https://doi.org/10.1149/..
?
4
Cyclic Plasma Treatment during ALD Hf1-XZrxO2 Deposition:
Bhuyian, Mdnasiruddin
;
Misra, Durga
;
Tapily, Kandabara
...
ECS Transactions. 61 (2014) 2 - p. 41-53 , 2014
Link:
https://doi.org/10.1149/..
?
5
Reliability of ALD Hf1-XZrxO2 Deposited by Intermediate Ann..:
Bhuyian, Mdnasiruddin
;
Misra, Durga
;
Tapily, Kandabara
...
ECS Transactions. 58 (2013) 7 - p. 17-29 , 2013
Link:
https://doi.org/10.1149/..
?
6
Physical and Electrical Effects of the Dep-Anneal-Dep-Annea..:
Clark, Robert D.
;
Aoyama, Shintaro
;
Consiglio, Steve
..
ECS Transactions. 35 (2011) 4 - p. 815-834 , 2011
Link:
https://doi.org/10.1149/..
?
7
Extension of Far UV spectroscopic ellipsometry studies of H..:
Kamineni, Vimal K.
;
Hilfiker, James N.
;
Freeouf, John L.
...
Thin Solid Films. 519 (2011) 9 - p. 2894-2898 , 2011
Link:
https://doi.org/10.1016/..
?
8
Methodology of ALD HfO2 High-κ Gate Dielectric Optimization..:
Jagannathan, Hemanth
;
Clark, Robert D.
;
Consiglio, Steve
...
ECS Transactions. 33 (2010) 3 - p. 157-164 , 2010
Link:
https://doi.org/10.1149/..
?
9
Optimizing Band-Edge High-κ/Metal Gate n-MOSFETs with ALD L..:
Clark, Robert D.
;
Jagannathan, Hemanth
;
Consiglio, Steve
...
ECS Transactions. 33 (2010) 3 - p. 75-81 , 2010
Link:
https://doi.org/10.1149/..
?
10
High-K Gate Dielectric Structures by Atomic Layer Depositio..:
Clark, Robert D.
;
Consiglio, Steve
;
Wajda, Cory
...
ECS Transactions. 16 (2008) 4 - p. 291-305 , 2008
Link:
https://doi.org/10.1149/..
?
11
Chemical vapor deposition of ruthenium and ruthenium oxide ..:
Papadatos, Filippos
;
Consiglio, Steve
;
Skordas, Spyridon
...
Journal of Materials Research. 19 (2004) 10 - p. 2947-2955 , 2004
Link:
https://doi.org/10.1557/..
1-11