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Piezoelectric Sensors; Springer Series on Chemical Sensors and Biosensors ,
8
Examples of Vibrating MEMS Sensing Physical Parameters for ..:
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2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) ,
9
A Simple Process for the Fabrication of Parallel-Plate Elec..:
, In:
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2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) ,
15