Eder-Kapl, Stefan
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1

Ion multi-beam direct sputtering of Si imprint stamps and s..:

Eder-Kapl, Stefan ; Steiger-Thirsfeld, Andreas ; Wellenzohn, Markus...
Journal of Micromechanics and Microengineering.  22 (2012)  5 - p. 055008 , 2012
 
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3

Characterization of CMOS programmable multi-beam blanking a..:

Eder Kapl, Stefan ; Loeschner, Hans ; Piller, Walter...
Journal of Micromechanics and Microengineering.  21 (2011)  4 - p. 045038 , 2011
 
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4

Nanoimprint lithography from CHARPAN Tool exposed master st..:

Muehlberger, M. ; Boehm, M. ; Bergmair, I....
Microelectronic Engineering.  88 (2011)  8 - p. 2070-2073 , 2011
 
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7

High Strength Low Alloy Steel Weldments with Accommodated Q..:

Rauch, Rudolf ; Kapl, Stefan ; Posch, Gerhard.
BHM Berg- und Hüttenmännische Monatshefte.  157 (2012)  3 - p. 102-107 , 2012
 
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