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2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) ,
3
Wideband and Highly Sensitive Micromachined PZT Film-Based ..:
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2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) ,
5
Micromachined Piezoelectric Film-Based Flexible Electronics..:
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2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) ,
13