Frühauf, Joachim
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9

Silicon as a plastic material:

Frühauf, Joachim ; Gärtner, Eva ; Jänsch, Erhard
Journal of Micromechanics and Microengineering.  9 (1999)  4 - p. 305-312 , 1999
 
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10

Anistropic multi-step etch processes of silicon:

Frühauf, Joachim ; Hannemann, Birgit
Journal of Micromechanics and Microengineering.  7 (1997)  3 - p. 137-140 , 1997
 
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15

Small force metrology for AFM, stylus instruments, CMM and ..:

Brand, Uwe ; Li, Zhi ; Popadic, Radovan...
Engineering for a changing world -- 10.22032/dbt.58663 -- urn:nbn:de:gbv:ilm1-2023isc:1 -- http://uri.gbv.de/document/gvk:ppn:1869512545.  , 2023
 
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