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Hahm, Kai
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1

Precision of diamond turning sinusoidal structures as measu..:

Hüser, Dorothee ; Meeß, Rudolf ; Dai, Gaoliang...
Surface Topography: Metrology and Properties.  12 (2024)  1 - p. 015014 , 2024
Link: https://doi.org/10.1088/..
 
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2

Correction: Comparison of EUV Photomask Metrology Between C..:

Dai, Gaoliang ; Hahm, Kai ; Sebastian, Lipfert.
Nanomanufacturing and Metrology.  5 (2022)  4 - p. 440-440 , 2022
Link: https://doi.org/10.1007/..
 
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3

Comparison of EUV Photomask Metrology Between CD-AFM and TE:

Dai, Gaoliang ; Hahm, Kai ; Sebastian, Lipfert.
Nanomanufacturing and Metrology.  5 (2022)  2 - p. 91-100 , 2022
Link: https://doi.org/10.1007/..
 
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4

Quantitative Element‐Sensitive Analysis of Individual Nanoo..:

Wählisch, André ; Unterumsberger, Rainer ; Hönicke, Philipp...
Small.  19 (2022)  9 - p. , 2022
Link: https://doi.org/10.1002/..
 
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5

Accurate tip characterization in critical dimension atomic ..:

Dai, Gaoliang ; Xu, Linyan ; Hahm, Kai
Measurement Science and Technology.  31 (2020)  7 - p. 074011 , 2020
Link: https://doi.org/10.1088/..
 
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6

Comparison of line width calibration using critical dimensi..:

Dai, Gaoliang ; Hahm, Kai ; Bosse, Harald.
Measurement Science and Technology.  28 (2017)  6 - p. 065010 , 2017
Link: https://doi.org/10.1088/..
 
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7

Measurements of CD and sidewall profile of EUV photomask st..:

Dai, Gaoliang ; Hahm, Kai ; Scholze, Frank...
Measurement Science and Technology.  25 (2014)  4 - p. 044002 , 2014
Link: https://doi.org/10.1088/..
 
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8

Quantitative Element‐Sensitive Analysis of Individual Nanoo..:

Wählisch, André ; Unterumsberger, Rainer ; Hönicke, Philipp...
10.14279/depositonce-19735.  , 2023
Link: https://depositonce.tu-b..
 
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9

The Future of Veteran Community Engagement: Perspectives on..:

Chavez, Margeaux Alana ; Blevins, Kai River ; Brown, Christopher...
https://account.journal-veterans-studies.org/index.php/vt-j-jvs/article/view/360/394.  , 2022
Link: https://account.journal-..
 
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10

Genomewide Clonal Analysis of Lethal Mutations in the Droso..:

Call, Gerald B ; Olson, John M ; Chen, Jiong...
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC2034635.  , 2007
Link: http://www.ncbi.nlm.nih...
 
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