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Halbach, Chloe
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Fabrication and Characterization of Large-Area Flexible Cap..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Halbach, Chloe
;
Segers, Jeremy
;
Rochus, Veronique
... - p. 943-946 , 2024
Link:
https://doi.org/10.1109/..
1-1
