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Hamamura, Hirotaka
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1

Thermal-cyclic atomic layer etching of cobalt with smooth e..:

Fujisaki, Sumiko ; Yamaguchi, Yoshihide ; Kobayashi, Hiroyuki...
Applied Physics Letters.  121 (2022)  12 - p. , 2022
Link: https://doi.org/10.1063/..
 
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2

Dry etching of ternary metal carbide TiAlC via surface modi..:

Nguyen, Thi-Thuy-Nga ; Shinoda, Kazunori ; Hamamura, Hirotaka...
Scientific Reports.  12 (2022)  1 - p. , 2022
Link: https://doi.org/10.1038/..
 
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3

Formation Mechanism of Rounded SiGe-Etch Front in Isotropic..:

Zhao, Yu ; Iwase, Taku ; Satake, Makoto.
IEEE Journal of the Electron Devices Society.  9 (2021)  - p. 1112-1116 , 2021
Link: https://doi.org/10.1109/..
 
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4

Two-step breakdown of a SiN membrane for nanopore fabricati..:

Yanagi, Itaru ; Hamamura, Hirotaka ; Akahori, Rena.
Scientific Reports.  8 (2018)  1 - p. , 2018
Link: https://doi.org/10.1038/..
 
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5

Thickness-dependent dielectric breakdown and nanopore creat..:

Yanagi, Itaru ; Fujisaki, Koji ; Hamamura, Hirotaka.
Journal of Applied Physics.  121 (2017)  4 - p. , 2017
Link: https://doi.org/10.1063/..
 
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6

Direct Observation of Dielectric Breakdown at Step-Bunching..:

Mori, Yuki ; Matsumura, Mieko ; Hamamura, Hirotaka...
Materials Science Forum.  821-823 (2015)  - p. 468-471 , 2015
Link: https://doi.org/10.4028/..
 
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7

Reliable 4H-SiC MOSFET with High Threshold Voltage by Al2O3..:

Shima, Akio ; Watanabe, Kikuo ; Mine, Toshiyuki...
Materials Science Forum.  821-823 (2015)  - p. 725-728 , 2015
Link: https://doi.org/10.4028/..
 
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8

Device Performance and Reliability of Fully Developed SOI T..:

Matsumura, Mieko ; Hatano, Mutsuko ; Hamamura, Hirotaka...
ECS Transactions.  8 (2007)  1 - p. 33-38 , 2007
Link: https://doi.org/10.1149/..
 
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9

High Reliability and Performance Poly-Si TFTs for System in..:

Hatano, Mutsuko ; Matsumura, Mieko ; Toyota, Yoshiaki...
ECS Transactions.  3 (2006)  8 - p. 35-41 , 2006
Link: https://doi.org/10.1149/..
 
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10

Electro-Luminescence from Ultra-Thin Silicon:

Saito, Shin-ichi ; Hisamoto, Digh ; Shimizu, Haruka...
Japanese Journal of Applied Physics.  45 (2006)  7L - p. L679 , 2006
Link: https://doi.org/10.1143/..
 
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11

Silicon light-emitting transistor for on-chip optical inter..:

Saito, Shin-ichi ; Hisamoto, Digh ; Shimizu, Haruka...
Applied Physics Letters.  89 (2006)  16 - p. 163504 , 2006
Link: https://doi.org/10.1063/..
 
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12

Effects of remote-surface-roughness scattering on carrier m..:

Saito, Shin-ichi ; Torii, Kazuyoshi ; Shimamoto, Yasuhiro...
Applied Physics Letters.  84 (2004)  8 - p. 1395-1397 , 2004
Link: https://doi.org/10.1063/..
 
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13

Adhesion Characteristics between Chemical Vapor Deposited C..:

Kim, Young Suk ; Hamamura, Hirotaka ; Shimogaki, Yukihiro
Japanese Journal of Applied Physics.  41 (2002)  Part 1, No. 3A - p. 1500-1506 , 2002
Link: https://doi.org/10.1143/..
 
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14

TiN Films Prepared by Flow Modulation Chemical Vapor Deposi..:

Hirotaka Hamamura, Hirotaka Hamamura ; Hiroshi Komiyama, Hiroshi Komiyama ; Yukihiro Shimogaki, Yukihiro Shimogaki
Japanese Journal of Applied Physics.  40 (2001)  3R - p. 1517 , 2001
Link: https://doi.org/10.1143/..
 
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15

Surface Protrusions of Chemical Vapor Deposited TiN Films C..:

Cheng, Degang ; Ogawa, Yoshifumi ; Hamamura, Hirotaka...
Japanese Journal of Applied Physics.  37 (1998)  5B - p. L607 , 1998
Link: https://doi.org/10.1143/..
 
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