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Han, Ruochen
146  results:
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1

Application of a Slurry Injection System to Cobalt "Buff St..:

Stuffle, Calliandra ; Han, Ruochen ; Sampurno, Yasa...
ECS Journal of Solid State Science and Technology.  7 (2018)  4 - p. P170-P174 , 2018
Link: https://doi.org/10.1149/..
 
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2

Effect of Retaining Ring Slot Designs, Conditioning Discs a..:

Bengochea, Leticia Vazquez ; Sampurno, Yasa ; Stuffle, Calliandra...
ECS Journal of Solid State Science and Technology.  7 (2018)  5 - p. P253-P259 , 2018
Link: https://doi.org/10.1149/..
 
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3

Effect of CVD-Coated Diamond Discs on Pad Surface Micro-Tex..:

Stuffle, Calliandra ; Han, Ruochen ; Sampurno, Yasa...
ECS Journal of Solid State Science and Technology.  7 (2018)  2 - p. P9-P14 , 2018
Link: https://doi.org/10.1149/..
 
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4

Visualizing Slurry Flow in Chemical Mechanical Planarizatio..:

Bengochea, Leticia Vazquez ; Sampurno, Yasa ; Stuffle, Calliandra...
ECS Journal of Solid State Science and Technology.  7 (2018)  3 - p. P118-P124 , 2018
Link: https://doi.org/10.1149/..
 
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5

Cobalt "Buff Step" Chemical Mechanical Planarization:

Stuffle, Calliandra ; Han, Ruochen ; Sampurno, Yasa...
ECS Journal of Solid State Science and Technology.  7 (2018)  3 - p. P114-P117 , 2018
Link: https://doi.org/10.1149/..
 
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6

Effect of Pad Surface Micro-Texture on Tribological, Therma..:

Han, Ruochen ; Mu, Yan ; Sampurno, Yasa..
ECS Journal of Solid State Science and Technology.  6 (2017)  4 - p. P201-P206 , 2017
Link: https://doi.org/10.1149/..
 
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7

Application of the Stribeck+ Curve in Silicon Dioxide Chemi..:

Han, Ruochen ; Sampurno, Yasa ; Theng, Siannie...
ECS Journal of Solid State Science and Technology.  6 (2017)  4 - p. P161-P164 , 2017
Link: https://doi.org/10.1149/..
 
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8

Improvements in Stribeck Curves for Copper and Tungsten Che..:

Bahr, Matthew ; Sampurno, Yasa ; Han, Ruochen.
ECS Journal of Solid State Science and Technology.  6 (2017)  5 - p. P290-P295 , 2017
Link: https://doi.org/10.1149/..
 
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9

Effect of Various Slurry Injection System Configurations on..:

Han, Ruochen ; Sampurno, Yasa ; Bahr, Matthew...
ECS Journal of Solid State Science and Technology.  6 (2017)  7 - p. P449-P454 , 2017
Link: https://doi.org/10.1149/..
 
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10

Effect of Conditioning and Slurry Application Method on Sil..:

Han, Ruochen ; Sampurno, Yasa ; Bahr, Matthew..
ECS Journal of Solid State Science and Technology.  6 (2017)  7 - p. P477-P482 , 2017
Link: https://doi.org/10.1149/..
 
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11

Slurry Injection Schemes on the Extent of Slurry Mixing and..:

Bahr, Matthew ; Sampurno, Yasa ; Han, Ruochen.
Micromachines.  8 (2017)  6 - p. 170 , 2017
Link: https://doi.org/10.3390/..
 
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12

Effect of Slurry Injection System Position on Removal Rate ..:

Bahr, Matthew ; Sampurno, Yasa ; Han, Ruochen...
ECS Journal of Solid State Science and Technology.  6 (2017)  7 - p. P455-P461 , 2017
Link: https://doi.org/10.1149/..
 
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13

Method for Ultra Rapid Determination of the Lubrication Mec..:

Han, Ruochen ; Sampurno, Yasa ; Theng, Siannie...
ECS Journal of Solid State Science and Technology.  6 (2016)  1 - p. P32-P37 , 2016
Link: https://doi.org/10.1149/..
 
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14

Feasibility of a Real-Time Method in Determine the Extent o..:

Han, Ruochen ; Sampurno, Yasa ; Philipossian, Ara
Tribology Letters.  62 (2016)  2 - p. , 2016
Link: https://doi.org/10.1007/..
 
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15

Fractional In Situ Pad Conditioning in Chemical Mechanical ..:

Han, Ruochen ; Sampurno, Yasa ; Philipossian, Ara
Tribology Letters.  65 (2016)  1 - p. , 2016
Link: https://doi.org/10.1007/..
 
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