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Hirose, Yukinori
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1

Impact of additional Pt and NiSi crystal orientation on cha..:

Mizuo, Mariko ; Yamaguchi, Tadashi ; Kudo, Shuichi...
Japanese Journal of Applied Physics.  53 (2014)  4S - p. 04EA02 , 2014
Link: https://doi.org/10.7567/..
 
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2

Study of formation mechanism of nickel silicide discontinui..:

Kudo, Shuichi ; Hirose, Yukinori ; Ogawa, Yoshifumi...
Japanese Journal of Applied Physics.  53 (2014)  2 - p. 021301 , 2014
Link: https://doi.org/10.7567/..
 
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3

Analysis of Channel Stress Induced by NiPt-Silicide in Meta..:

Mizuo, Mariko ; Yamaguchi, Tadashi ; Kudo, Shuichi...
Japanese Journal of Applied Physics.  52 (2013)  9R - p. 096502 , 2013
Link: https://doi.org/10.7567/..
 
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4

Study of strain fields caused by crystallization of boron d..:

Nakanishi, Nobuto ; Arie, Hiroyuki ; Kunimune, Yorinobu...
Journal of Applied Physics.  112 (2012)  4 - p. , 2012
Link: https://doi.org/10.1063/..
 
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5

Structure-Modification Model of Porogen-Based Porous SiOC F..:

Oka, Yoshihiro ; Uedono, Akira ; Goto, Kinya...
Japanese Journal of Applied Physics.  50 (2011)  5S1 - p. 05EB06 , 2011
Link: https://doi.org/10.7567/..
 
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6

Analysis of Sidewall Damage Layer in Low-k Film Using the I..:

Furuhashi, Takahisa ; Nakanishi, Nobuto ; Matsumoto, Masahiro...
Japanese Journal of Applied Physics.  50 (2011)  5S1 - p. 05EB07 , 2011
Link: https://doi.org/10.1143/..
 
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7

Analysis of Sidewall Damage Layer in Low-kFilm Using the In..:

Furuhashi, Takahisa ; Nakanishi, Nobuto ; Matsumoto, Masahiro...
Japanese Journal of Applied Physics.  50 (2011)  5S1 - p. 05EB07 , 2011
Link: https://doi.org/10.7567/..
 
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8

Structure-Modification Model of Porogen-Based Porous SiOC F..:

Oka, Yoshihiro ; Uedono, Akira ; Goto, Kinya...
Japanese Journal of Applied Physics.  50 (2011)  5S1 - p. 05EB06 , 2011
Link: https://doi.org/10.1143/..
 
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9

Three-Dimensional Visualization Technique for Crystal Defec..:

Kudo, Shuichi ; Nakanishi, Nobuto ; Hirose, Yukinori...
Japanese Journal of Applied Physics.  49 (2010)  4S - p. 04DA22 , 2010
Link: https://doi.org/10.1143/..
 
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10

Characterizations of NiSi2-Whisker Defects in n-Channel Met..:

Yamaguchi, Tadashi ; Kashihara, Keiichiro ; Kudo, Shuichi...
Japanese Journal of Applied Physics.  49 (2010)  12R - p. 126503 , 2010
Link: https://doi.org/10.1143/..
 
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11

Oxygen distribution in nickel silicide films analyzed by ti..:

Kobayashi, Kiyoteru ; Watanabe, Hiroaki ; Maekawa, Kazuyoshi...
Micron.  41 (2010)  5 - p. 412-415 , 2010
Link: https://doi.org/10.1016/..
 
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12

Characterization of Low-k/Cu Damascene Structures Using Mon..:

Uedono, Akira ; Inoue, Naoya ; Hayashi, Yoshihiro...
Japanese Journal of Applied Physics.  48 (2009)  12 - p. 120222 , 2009
Link: https://doi.org/10.1143/..
 
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13

Impact of Al in Cu alloy interconnects on electro and stres..:

Maekawa, Kazuyoshi ; Mori, Kenichi ; Suzumura, Naohito...
Microelectronic Engineering.  85 (2008)  10 - p. 2137-2141 , 2008
Link: https://doi.org/10.1016/..
 
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14

Three-dimensional analysis for multilayer wiring in sub-hal..:

Murata, Naofumi ; Hirose, Yukinori ; Maekawa, Kazuyoshi..
Microelectronics Reliability.  37 (1997)  10-11 - p. 1615-1618 , 1997
Link: https://doi.org/10.1016/..
 
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15

Fuel Management Effects on Inherent Safety of Modular High ..:

HIROSE, Yukinori ; LIEM, Peng Hong ; SUETOMI, Eiichi..
Journal of Nuclear Science and Technology.  26 (1989)  7 - p. 647-654 , 1989
Link: https://doi.org/10.1080/..
 
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