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Jagdhold, U.
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Online (10)
Mediatypes
Articles (Online) (9)
OpenAccess-fulltext (1)
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1
Electron beam lithography over topography:
Bauch, L.
;
Jagdhold, U.
;
Böttcher, M.
Microelectronic Engineering. 30 (1996) 1-4 - p. 53-56 , 1996
Link:
https://doi.org/10.1016/..
?
2
Influence of interdiffusion and surfactants on Si/SiGe hete..:
Zeindl, H.P.
;
Nilsson, S.
;
Jagdhold, U.
...
Applied Surface Science. 102 (1996) - p. 107-111 , 1996
Link:
https://doi.org/10.1016/..
?
3
Strain measurement in thin pseudomorphic SiGe layers of sub..:
Dietrich, B.
;
Bugiel, E.
;
Frankenfeldt, H.
...
Solid-State Electronics. 40 (1996) 1-8 - p. 307-310 , 1996
Link:
https://doi.org/10.1016/..
?
4
Resist process to join electron beam lithography and photol..:
Bauch, L.
;
Bo¨ttcher, M.
;
Jagdhold, U.
Microelectronic Engineering. 27 (1995) 1-4 - p. 371-374 , 1995
Link:
https://doi.org/10.1016/..
?
5
Antimony implantation into Si-B doping superlattices—damage..:
Krüger, D.
;
Jagdhold, U.
;
Kurps, R.
.
Journal of Applied Physics. 78 (1995) 8 - p. 5008-5012 , 1995
Link:
https://doi.org/10.1063/..
?
6
X-ray in situ observation of relaxation and diffusion proce..:
Zaumseil, P.
;
Jagdhold, U.
;
Krüger, D.
Journal of Applied Physics. 76 (1994) 4 - p. 2191-2196 , 1994
Link:
https://doi.org/10.1063/..
?
7
Dry etching pattern transfer of 0.3 μm structures in techno..:
Bauch, L.
;
Wolff, A.
;
Jagdhold, U.
..
Microelectronic Engineering. 23 (1994) 1-4 - p. 377-380 , 1994
Link:
https://doi.org/10.1016/..
?
8
Passivation effects in novolak based resists during O2-RIE:
Jagdhold, U.
;
Pelka, J.
Microelectronic Engineering. 17 (1992) 1-4 - p. 331-335 , 1992
Link:
https://doi.org/10.1016/..
?
9
Submicrometer photolithography by surface imaging - experim..:
Bauch, L.
;
Jagdhold, U.
;
Bauer, J.
...
Microelectronic Engineering. 13 (1991) 1-4 - p. 89-92 , 1991
Link:
https://doi.org/10.1016/..
?
10
Optical proximity correction for 0.13 um SiGe:C BiCMOS:
Geisler, Sebastian
;
Bauer, Joachim
;
Haak, Ulrich
...
https://opus4.kobv.de/opus4-th-wildau/frontdoor/index/index/docId/1519. , 2008
Link:
https://opus4.kobv.de/op..
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