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2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) ,
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Integrating 8nm Self-Aligned Tip-to-Tip to Enable 4-track S..:
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2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) ,
2
Selective ALD Mo Deposition in 10nm Contacts:
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2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) ,
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Molybdenum Nitride as a Scalable and Thermally Stable pWFM ..:
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2022 IEEE International Interconnect Technology Conference (IITC) ,
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Low Resistance Cu Vias for 24nm Pitch and Beyond:
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2022 IEEE International Interconnect Technology Conference (IITC) ,
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Enabling 3-level High Aspect Ratio Supervias for 3nm nodes ..:
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2021 IEEE International Electron Devices Meeting (IEDM) ,
6
Buried Power Rail Metal exploration towards the 1 nm Node:
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2021 IEEE International Interconnect Technology Conference (IITC) ,
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Exploring W-Cu hybrid dual damascene metallization for futu..:
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2020 IEEE Symposium on VLSI Technology ,
9
Buried Power Rail Integration with Si FinFETs for CMOS Scal..:
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2020 IEEE International Reliability Physics Symposium (IRPS) ,
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Dielectric Reliability Study of 21 nm Pitch Interconnects w..:
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2020 IEEE International Interconnect Technology Conference (IITC) ,
11
Hybrid Metallization with Cu in sub 30nm Interconnects:
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2020 IEEE International Electron Devices Meeting (IEDM) ,
12
Buried Power Rail Scaling and Metal Assessment for the 3 nm..:
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2019 IEEE International Electron Devices Meeting (IEDM) ,
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