Kücher, Peter
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5

In Situ Reaction Mechanism Studies on Ozone-Based Atomic La..:

Rose, Martin ; Niinistö, Jaakko ; Endler, Ingolf...
ACS Applied Materials & Interfaces.  2 (2010)  2 - p. 347-350 , 2010
 
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7

Novel enhanced stressors with graded encapsulated SiGe embe..:

Naumann, Andreas ; Kronholz, Stephan ; Mowry, Anthony...
Materials Science and Engineering: B.  154-155 (2008)  - p. 95-97 , 2008
 
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9

A roadmap towards cost efficient 300mm equipment:

Pfitzner, Lothar ; Kücher, Peter
Materials Science in Semiconductor Processing.  5 (2002)  4-5 - p. 321-331 , 2002
 
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10

Clustertools — ein neues Anlagenkonzept für die Schichthers..:

Kücher, Peter
Vakuum in Forschung und Praxis.  4 (1992)  4 - p. 255-262 , 1992
 
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