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Kamata, Isaho
73
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1
Quality Evaluation of 150 mm 4H-SiC Grown at over 1.5 mm/h ..:
Okamoto, Takeshi
;
Uehigashi, Hideyuki
;
Kanda, Takahiro
...
Solid State Phenomena. 342 (2023) - p. 105-112 , 2023
Link:
https://doi.org/10.4028/..
?
2
Investigation of propagation and coalescence of threading s..:
Kamata, Isaho
;
Hoshino, Norihiro
;
Betsuyaku, Kiyoshi
..
Journal of Crystal Growth. 590 (2022) - p. 126676 , 2022
Link:
https://doi.org/10.1016/..
?
3
Mechanical-stressing measurements of formation energy of si..:
Maeda, Koji
;
Murata, Koichi
;
Kamata, Isaho
.
Applied Physics Express. 14 (2021) 4 - p. 044001 , 2021
Link:
https://doi.org/10.35848..
?
4
Formation of Double Shockley Stacking Faults in Heavily Nit..:
Sugiyama, Naohiro
;
Mitani, Takeshi
;
Kamata, Isaho
...
Materials Science Forum. 1004 (2020) - p. 427-432 , 2020
Link:
https://doi.org/10.4028/..
?
5
Fast 4H-SiC Bulk Growth by High-Temperature Gas Source Meth..:
Tokuda, Yuichiro
;
Hoshino, Norihiro
;
Kuno, Hironari
...
Materials Science Forum. 1004 (2020) - p. 5-13 , 2020
Link:
https://doi.org/10.4028/..
?
6
Reduction in dislocation densities in 4H-SiC bulk crystal g..:
Hoshino, Norihiro
;
Kamata, Isaho
;
Kanda, Takahiro
...
Applied Physics Express. 13 (2020) 9 - p. 095502 , 2020
Link:
https://doi.org/10.35848..
?
7
Development of 150-mm 4H-SiC Substrates Using a High-Temper..:
Okamoto, Takeshi
;
Kanda, Takahiro
;
Tokuda, Yuichiro
...
Materials Science Forum. 1004 (2020) - p. 14-19 , 2020
Link:
https://doi.org/10.4028/..
?
8
Suppressed expansion of single Shockley stacking faults at ..:
Maeda, Koji
;
Murata, Koichi
;
Tawara, Takeshi
..
Applied Physics Express. 12 (2019) 12 - p. 124002 , 2019
Link:
https://doi.org/10.7567/..
?
9
Direct evaluation of threading dislocations in 4H-SiC throu..:
Hadorn, Jason Paul
;
Tanuma, Ryohei
;
Kamata, Isaho
.
Philosophical Magazine. 100 (2019) 2 - p. 194-216 , 2019
Link:
https://doi.org/10.1080/..
?
10
Glide of C-core partial dislocations along edges of expandi..:
Tokuda, Yuichiro
;
Kamata, Isaho
;
Hoshino, Norihiro
.
Japanese Journal of Applied Physics. 58 (2019) 12 - p. 121005 , 2019
Link:
https://doi.org/10.7567/..
?
11
Monitoring of Substrate and Epilayer Surfaces by Mirror Pro..:
Kamata, Isaho
;
Ohira, Kentaro
;
Kobayashi, Kenji
...
Materials Science Forum. 963 (2019) - p. 255-258 , 2019
Link:
https://doi.org/10.4028/..
?
12
X-ray topographical analysis of 4H-SiC epitaxial layers usi..:
Kamata, Isaho
;
Tsusaka, Yoshiyuki
;
Tanuma, Ryohei
.
Japanese Journal of Applied Physics. 57 (2018) 9 - p. 090314 , 2018
Link:
https://doi.org/10.7567/..
?
13
Immobilization Phenomenon of Partials Surrounding Double Sh..:
Sugiyama, Naohiro
;
Suo, Hiromasa
;
Eto, Kazuma
...
Materials Science Forum. 924 (2018) - p. 160-163 , 2018
Link:
https://doi.org/10.4028/..
?
14
X-Ray Topography Analysis of 4H-SiC Crystals Grown by the H..:
Kamata, Isaho
;
Hoshino, Norihiro
;
Tokuda, Yuichiro
...
Materials Science Forum. 924 (2018) - p. 180-183 , 2018
Link:
https://doi.org/10.4028/..
?
15
Recent advances in 4H-SiC epitaxy for high-voltage power de..:
Tsuchida, Hidekazu
;
Kamata, Isaho
;
Miyazawa, Tetsuya
...
Materials Science in Semiconductor Processing. 78 (2018) - p. 2-12 , 2018
Link:
https://doi.org/10.1016/..
1-15