Kamataki, Kunihiro
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9

Low-temperature fabrication of silicon nitride thin films f..:

Kamataki, Kunihiro ; Sasaki, Yusuke ; Nagao, Iori...
Materials Science in Semiconductor Processing.  164 (2023)  - p. 107613 , 2023
 
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11

Role of insoluble atoms in the formation of a three-dimensi..:

Yamashita, Naoto ; Mitsuishi, Ryo ; Nakamura, Yuta...
Journal of Materials Research.  38 (2023)  5 - p. 1178-1185 , 2023
 
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12

Contribution of active species generated in plasma to CO2 m..:

Toko, Susumu ; Hasegawa, Taiki ; Okumura, Takamasa...
Japanese Journal of Applied Physics.  62 (2023)  SL - p. SL1023 , 2023
 
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15

Reaction kinetics studies for phenol degradation under the ..:

El-Tayeb, A. ; Okumura, Takamasa ; Attri, Pankaj...
Japanese Journal of Applied Physics.  62 (2023)  SN - p. SN1010 , 2023
 
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