I agree that this site is using cookies. You can find further informations here.
X
Kanjolia, Ravindra
35  results:
Search for persons X
?
1

Co Metal ALD on Cu with Cyclic Clean by Peroxide and Hydraz..:

, In: 2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA),
Kuo, Cheng-Hsuan ; Pal, Dipayan ; Wang, Victor... - p. 1-2 , 2024
Link: https://doi.org/10.1109/..
 
?
2

Low-Resistivity Titanium Nitride Thin Films Fabricated by A..:

Kuo, Cheng-Hsuan ; Mcleod, Aaron J. ; Lee, Ping-Che...
ACS Applied Electronic Materials.  5 (2023)  8 - p. 4094-4102 , 2023
Link: https://doi.org/10.1021/..
 
?
3

Pulsed chemical vapor deposition for crystalline aluminum n..:

McLeod, Aaron J. ; Ueda, Scott T. ; Lee, Ping C....
Thin Solid Films.  768 (2023)  - p. 139717 , 2023
Link: https://doi.org/10.1016/..
 
?
4

Reverse Templating Effects of Low-Resistivity Ru ALD on Spu..:

, In: 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM),
Wang, Victor ; Kuo, Chenghsuan ; Kanjolia, Ravindra... - p. 1-3 , 2023
Link: https://doi.org/10.1109/..
 
?
5

Atomic layer annealing with radio-frequency substrate bias ..:

McLeod, Aaron J. ; Lee, Ping C. ; Ueda, Scott T....
MRS Bulletin.  48 (2023)  11 - p. 1164-1171 , 2023
Link: https://doi.org/10.1557/..
 
?
6

Experimental and theoretical determination of the role of i..:

Ueda, Scott T. ; McLeod, Aaron ; Jo, Youhwan...
Journal of Materials Chemistry C.  10 (2022)  14 - p. 5707-5715 , 2022
Link: https://doi.org/10.1039/..
 
?
7

Ru ALD With Bulk-Like Resistivity for Interconnects:

, In: 2022 IEEE International Interconnect Technology Conference (IITC),
Breeden, Michael ; Wang, Victor ; Kanjolia, Ravindra... - p. 120-122 , 2022
Link: https://doi.org/10.1109/..
 
?
8

Tris(dimethylamido)aluminum(III) and N2H4: Ideal precursors..:

Ueda, Scott T. ; McLeod, Aaron ; Alvarez, Dan...
Applied Surface Science.  554 (2021)  - p. 149656 , 2021
Link: https://doi.org/10.1016/..
 
?
9

The role of oxide formation on insulating versus metallic s..:

Wolf, Steven ; Breeden, Michael ; Ueda, Scott...
Applied Surface Science.  510 (2020)  - p. 144804 , 2020
Link: https://doi.org/10.1016/..
 
?
10

Plasmonic Metal-to-Semiconductor Switching in Au Nanorod-Zn..:

Wu, Fei ; Tian, Limei ; Kanjolia, Ravindra..
ACS Applied Materials & Interfaces.  5 (2013)  16 - p. 7693-7697 , 2013
Link: https://doi.org/10.1021/..
 
?
11

Comparison of saturator designs for delivery of low-volatil..:

Maslar, James E. ; Kimes, William A. ; Khromchenko, Vladimir B...
Journal of Crystal Growth.  607 (2023)  - p. 127102 , 2023
Link: https://doi.org/10.1016/..
 
?
12

Synthesis of Micron-Sized WS2 Crystallites Using Atomic Lay..:

Mullapudi, Kamesh ; Addou, Rafik ; Dezelah, Charles. L....
Chemistry of Materials.  35 (2023)  12 - p. 4649-4659 , 2023
Link: https://doi.org/10.1021/..
 
?
13

Semiconductor-to-metal transition in atomic layer depositio..:

Ganesan, Jeya Prakash ; Dev, Durjoy ; Krishnaprasad, Adithi...
Applied Physics Letters.  118 (2021)  26 - p. , 2021
Link: https://doi.org/10.1063/..
 
?
14

Proximity Effects of the Selective Atomic Layer Deposition ..:

Breeden, Michael ; Wang, Victor ; Spiegelman, Jacob...
ACS Applied Nano Materials.  4 (2021)  8 - p. 8447-8454 , 2021
Link: https://doi.org/10.1021/..
 
?
15

Nondispersive Infrared Gas Analyzer for Partial Pressure Me..:

Maslar, James E. ; Kimes, William A. ; Sperling, Brent A..
Applied Spectroscopy.  74 (2020)  10 - p. 1219-1229 , 2020
Link: https://doi.org/10.1177/..
 
1-15