Kerekes, Arpad
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1

Effects of Ion Channeling and Co-Implants on Ion Ranges and..:

Current, Michael I. ; Sakaguchi, Takuya ; Kawasaki, Yoji...
IEEE Journal of the Electron Devices Society.  12 (2024)  - p. 399-406 , 2024
 
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3

Effects of Ion Channeling and Co-implants on Ion Ranges and..:

, In: 2023 21st International Workshop on Junction Technology (IWJT),
 
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