I agree that this site is using cookies. You can find further informations
here
.
X
Login
My folder (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
Show Desktop-Version
Toggle navigation
Kesters, Els
15
results:
Search for persons
X
Format
Online (15)
Mediatypes
Articles (Online) (14)
OpenAccess-fulltext (1)
Sorted by: Relevance
Sorted by: Year
?
1
Controlled cobalt recess for advanced interconnect metalliz..:
Pacco, Antoine
;
Akanishi, Yuya
;
Le, Quoc Toan
...
Microelectronic Engineering. 217 (2019) - p. 111131 , 2019
Link:
https://doi.org/10.1016/..
?
2
Wet Metal Recess Process for Enabling Scaling Boosters:
Akanishi, Yuya
;
Kesters, Els
;
Le, Quoc Toan
..
ECS Transactions. 92 (2019) 2 - p. 255-263 , 2019
Link:
https://doi.org/10.1149/..
?
3
Study of Copper Surface Preparation by Sequential Atomic La..:
Iwasaki, Akihisa
;
Akanishi, Yuya
;
Mazzamuto, Fulvio
...
ECS Transactions. 80 (2017) 2 - p. 233-241 , 2017
Link:
https://doi.org/10.1149/..
?
4
Development of a Cu and W Compatible PERR Clean in BEOL Adv..:
Kesters, Els
;
Le, Quoc Toan
;
Decoster, Stefan
...
ECS Transactions. 69 (2015) 8 - p. 207-214 , 2015
Link:
https://doi.org/10.1149/..
?
5
Integration of Wet Cleaning in 45 Nm Pitch BEOL Processing:
Kesters, Els
;
Le, Quoc Toan
;
Lazzarino, Frederic
...
ECS Transactions. 58 (2013) 6 - p. 135-142 , 2013
Link:
https://doi.org/10.1149/..
?
6
PR and BARC Wet Strip in BEOL Patterning Using a UV-Enabled..:
Kesters, Els
;
Le, Quoc Toan
;
Lux, Marcel
...
ECS Transactions. 41 (2011) 5 - p. 269-276 , 2011
Link:
https://doi.org/10.1149/..
?
7
Influence of UV Irradiation on the Removal of Post-etch Pho..:
Kesters, Els
;
Le, Quoc Toan
;
Lux, Marcel
...
ECS Transactions. 25 (2009) 5 - p. 63-70 , 2009
Link:
https://doi.org/10.1149/..
?
8
Effect of Radical Scavenger and UV Irradiation on Removal o..:
Le, Quoc Toan
;
Lux, Marcel
;
Kesters, Els
..
ECS Transactions. 25 (2009) 5 - p. 71-77 , 2009
Link:
https://doi.org/10.1149/..
?
9
Alternative Photoresist Removal Process to Minimize Damage ..:
Le, Quoc Toan
;
Keldermans, Johan
;
Chiodarelli, Nicoló
...
Japanese Journal of Applied Physics. 47 (2008) 8S2 - p. 6870 , 2008
Link:
https://doi.org/10.1143/..
?
10
Post Ion-Implant Photoresist Removal via Wet Chemical Clean..:
Totir, George G.
;
Frank, Martin
;
Vos, Rita
...
ECS Transactions. 11 (2007) 2 - p. 219-226 , 2007
Link:
https://doi.org/10.1149/..
?
11
All-Wet Strip Approaches for Post-Etch Photoresist Layers A..:
Claes, Martine
;
Le, QuocToan
;
Kesters, Els
...
ECS Transactions. 11 (2007) 2 - p. 177-187 , 2007
Link:
https://doi.org/10.1149/..
?
12
Modifications of Porous Low-k by Plasma Treatments and Wet ..:
Xu, Kaidong
;
Vereecke, Guy
;
Kesters, Els
...
ECS Transactions. 11 (2007) 2 - p. 409-416 , 2007
Link:
https://doi.org/10.1149/..
?
13
Polymerization Behavior of Xanthate-Containing Monomers tow..:
Kesters, Els
;
Gillissen, Stijn
;
Motmans, Filip
..
Macromolecules. 35 (2002) 21 - p. 7902-7910 , 2002
Link:
https://doi.org/10.1021/..
?
14
Synthesis and Characterization of Poly(pyridine vinylene) v..:
Gillissen, Stijn
;
Jonforsen, Maria
;
Kesters, Els
...
Macromolecules. 34 (2001) 21 - p. 7294-7299 , 2001
Link:
https://doi.org/10.1021/..
?
15
Study of the thermal elimination and degradation processes ..:
Kesters, Els
http://hdl.handle.net/1942/8813. , 2002
Link:
http://hdl.handle.net/19..
1-15