Kim, Gwan-Ha
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4

Etch Mechanism of AlN Thin Film in Cl2/Ar Inductively Coupl..:

Woo, Jong-Chang ; Kim, Dong-Pyo ; Kim, Gwan-Ha
Transactions on Electrical and Electronic Materials.  23 (2022)  5 - p. 569-577 , 2022
 
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Etch Characteristics of ZrO2Thin Films in High Density Plas..:

Woo, Jong-Chang ; Kim, Gwan-Ha ; Kim, Dong-Pyo..
Japanese Journal of Applied Physics.  48 (2009)  8 - p. 08HD03 , 2009
 
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13

Characteristics of Nickel-doped Zinc Oxide thin films prepa..:

Kim, Kyoung-Tae ; Kim, Gwan-Ha ; Woo, Jong-Chang.
Surface and Coatings Technology.  202 (2008)  22-23 - p. 5650-5653 , 2008
 
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