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Kissinger, Gudrun
33  results:
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1

Investigation of the impact of amorphous silicon layers dep..:

Kissinger, Gudrun ; Kot, Dawid ; Bärwolf, Florian.
Materials Science in Semiconductor Processing.  164 (2023)  - p. 107614 , 2023
Link: https://doi.org/10.1016/..
 
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2

Simulation of Nitrogen Indiffusion and Its Impact on Silico..:

Müller, Timo ; Kissinger, Gudrun ; Kot, Dawid...
physica status solidi (a).  218 (2021)  23 - p. , 2021
Link: https://doi.org/10.1002/..
 
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3

List of contributors:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Aalto, Timo ; Airaksinen, Veli-Matti ; Albert, Stephan Gerhard... - p. xv-xvii , 2020
Link: https://doi.org/10.1016/..
 
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4

Measuring oxygen and bulk microdefects in silicon:

, In: Handbook of Silicon Based MEMS Materials and Technologies,
Savin, Hele ; Kissinger, Gudrun ; Airaksinen, Veli-Matti - p. 775-779 , 2020
Link: https://doi.org/10.1016/..
 
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5

Gettering and Defect Engineering in Semiconductor Technolog..:

Kissinger, Gudrun ; Kot, Dawid ; Richter, Hans.
physica status solidi (a).  216 (2019)  17 - p. , 2019
Link: https://doi.org/10.1002/..
 
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6

Near‐Surface Defect Control by Vacancy Injecting/Out‐Diffus..:

Müller, Timo ; Gehmlich, Michael ; Sattler, Andreas...
physica status solidi (a).  216 (2019)  17 - p. , 2019
Link: https://doi.org/10.1002/..
 
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7

(Invited) Oxygen in Silicon: End of the Story?:

Kissinger, Gudrun ; Kot, Dawid ; Schubert, Markus Andreas...
ECS Transactions.  86 (2018)  10 - p. 61-71 , 2018
Link: https://doi.org/10.1149/..
 
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8

VOn Complexes in RTA Treated Czochralski Silicon Wafers Inv..:

Kot, Dawid ; Kissinger, Gudrun ; Dabrowski, Jaroslaw.
ECS Transactions.  86 (2018)  10 - p. 95-103 , 2018
Link: https://doi.org/10.1149/..
 
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9

Sensitivity enhanced FTIR investigation of defects introduc..:

Kot, Dawid ; Kissinger, Gudrun ; Sattler, Andreas
Semiconductor Science and Technology.  32 (2017)  10 - p. 104006 , 2017
Link: https://doi.org/10.1088/..
 
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10

About the influence of deposited nitride layers on oxide pr..:

Kissinger, Gudrun ; Kot, Dawid ; Dabrowski, Jaroslaw...
physica status solidi (a).  214 (2017)  7 - p. , 2017
Link: https://doi.org/10.1002/..
 
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11

(Invited) Current Stage of the Investigation of the Composi..:

Kot, Dawid ; Kissinger, Gudrun ; Schubert, Markus Andreas.
ECS Transactions.  75 (2016)  4 - p. 53-67 , 2016
Link: https://doi.org/10.1149/..
 
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12

Investigation of the Composition of the Si/SiO2 Interface i..:

Kissinger, Gudrun ; Schubert, Markus Andreas ; Kot, Dawid.
ECS Transactions.  75 (2016)  4 - p. 81-95 , 2016
Link: https://doi.org/10.1149/..
 
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13

Composition of oxygen precipitates in Czochralski silicon w..:

Kot, Dawid ; Kissinger, Gudrun ; Schubert, Markus Andreas...
physica status solidi (RRL) – Rapid Research Letters.  9 (2015)  7 - p. 405-409 , 2015
Link: https://doi.org/10.1002/..
 
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14

Internal Gettering of Copper for Microelectronic Applicatio..:

Kissinger, Gudrun ; Kot, Dawid ; Schubert, Markus Andreas..
Solid State Phenomena.  242 (2015)  - p. 236-245 , 2015
Link: https://doi.org/10.4028/..
 
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15

Simulation of vacancy agglomeration based on ab initio calc..:

Kissinger, Gudrun ; Dabrowski, Jarek ; Kot, Dawid
Japanese Journal of Applied Physics.  53 (2014)  5S1 - p. 05FJ06 , 2014
Link: https://doi.org/10.7567/..
 
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