Kolawa, Elzbieta
8  results:
Search for persons X
?
1

Ion-Beam-Assisted Deposition of TiN Thin Films:

Kubota, Hiroshi ; Chen, Jen Sue ; Nagata, Masanori..
Japanese Journal of Applied Physics.  32 (1993)  8R - p. 3414 , 1993
 
?
5

WNx: Properties and applications:

So, Frank C.T. ; Kolawa, Elzbieta ; Zhao, Xin-An.
Thin Solid Films.  153 (1987)  1-3 - p. 507-520 , 1987
 
?
 
?
8

Sputtered W-N diffusion barriers:

Kattelus, Hannu ; Kolawa, Elzbieta ; Affolter, Klaus.
Kattelus , H , Kolawa , E , Affolter , K & Nicolet , M 1985 , ' Sputtered W-N diffusion barriers ' , Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , vol. 3 , no. 6 , pp. 2246-2254 . https://doi.org/10.1116/1.572901.  , 1985
 
1-8