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Kuboi, Shuichi
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1

Phenomenological model for predicting Cx Hy Fz+ ion etching..:

Kawamoto, Akiko ; Kataoka, Junji ; Kuboi, Shuichi..
Japanese Journal of Applied Physics.  62 (2023)  SI - p. SI1009 , 2023
Link: https://doi.org/10.35848..
 
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2

Time-varying mechanism of ion composition in a pulse-modula..:

Kuboi, Shuichi ; Kato, Haruhito ; Akatsuka, Yudai..
Japanese Journal of Applied Physics.  , 2023
Link: https://doi.org/10.35848..
 
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3

Mass spectroscopic measurement of time-varying ion composit..:

Kuboi, Shuichi ; Kato, Haruhito ; Seki, Yuto..
Japanese Journal of Applied Physics.  62 (2023)  SI - p. SI1003 , 2023
Link: https://doi.org/10.35848..
 
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4

Analysis of formation mechanism of deposited film in a high..:

Hiwasa, Noboru ; Kataoka, Junji ; Sasao, Norikatsu...
Applied Physics Express.  15 (2022)  10 - p. 106002 , 2022
Link: https://doi.org/10.35848..
 
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