E-LIB Suche - Ergebnisse für: Lachal, Laurent

1

Impact of pre-amorphization implantation schemes using beam..:

, In: 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM),

Guillemin, Sophie ; Lachal, Laurent ; Torregrosa, Frank... - p. 1-3 , 2023

Link: https://doi.org/10.1109/..

2

Strain Modification of PECVD Nitride By Plasma Immersion Io..:

Lachal, Laurent ; Plantier, Christophe ; Torregrosa, Franck...
ECS Transactions. 97 (2020) 3 - p. 93-99 , 2020

Link: https://doi.org/10.1149/..

3

Effects of Pre-amorphization Thickness and Carbon Implantat..:

, In: 2018 22nd International Conference on Ion Implantation Technology (IIT),

Lachal, Laurent ; Nemouchi, Fabrice ; Mazen, Frederic... - p. 54-57 , 2018

Link: https://doi.org/10.1109/..

4

Homojunction silicon solar cells doping by ion implantation:

Milési, Frédéric ; Coig, Marianne ; Lerat, Jean-François...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 409 (2017) - p. 53-59 , 2017

Link: https://doi.org/10.1016/..

5

Effects of Plasma and Wet Processes on Si-Rich Anti-Reflect..:

Pollet, Olivier ; Sommer, Romain ; Lachal, Laurent...
ECS Transactions. 58 (2013) 6 - p. 241-249 , 2013

Link: https://doi.org/10.1149/..

6

HF Vapor Release Assessment to Address NEMS Applications:

Lachal, Laurent ; Auclair, Sylvain ; Lavios, Pascal...
ECS Transactions. 16 (2008) 14 - p. 37-44 , 2008

Link: https://doi.org/10.1149/..

7

Organic Mask Removal Assessment for 32nm Fully Depleted SOI..:

Lachal, Laurent ; Chiaroni, Julien ; Lajoinie, Emile...
ECS Transactions. 16 (2008) 5 - p. 355-361 , 2008

Link: https://doi.org/10.1149/..

8

Resist Stripping Process on Germanium : a Basic Post-Implan..:

Lachal, Laurent ; Chiaroni, Julien ; Le Royer, Cyrille...
ECS Transactions. 3 (2006) 2 - p. 113-119 , 2006

Link: https://doi.org/10.1149/..

9

Physical and optical properties of sol-gel nano-silver dope..:

Li, Wenyan ; Seal, Sudipta ; Megan, Edward...
Journal of Applied Physics. 93 (2003) 12 - p. 9553-9561 , 2003

Link: https://doi.org/10.1063/..

10

NIBR-LTSi is a selective LATS kinase inhibitor activating Y..:

Namoto, Kenji ; Baader, Clara ; Orsini, Vanessa...
Cell Stem Cell. 31 (2024) 4 - p. 554-569.e17 , 2024

Link: https://doi.org/10.1016/..