Landis, Stefan
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3

List of Authors:

, In: Plasma Etching Processes for CMOS Devices Realization,
 
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Patterning Challenges in Microelectronics:

, In: Plasma Etching Processes for CMOS Devices Realization,
 
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Nano-lithography:

Copies:  Zentrale:E02 a elt 667 m /075
 
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Lithography 

main techniques 
Copies:  Zentrale:E02 a elt 667 m/062
 
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