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2021 IEEE International Interconnect Technology Conference (IITC) ,
9
Exploring W-Cu hybrid dual damascene metallization for futu..:
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2020 IEEE International Interconnect Technology Conference (IITC) ,
12
Hybrid Metallization with Cu in sub 30nm Interconnects:
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2020 IEEE International Reliability Physics Symposium (IRPS) ,
13
Metal reliability mechanisms in Ruthenium interconnects:
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2019 IEEE International Electron Devices Meeting (IEDM) ,
15